Trelleborg特瑞堡半導(dǎo)體行業(yè)應(yīng)用

我們致力于提供工業(yè)化解決辦法，并且為用戶提供定制化的密封和軸承解決方案，提高其應(yīng)用性能。尤其在下列行業(yè)內(nèi)我們擁有豐富的經(jīng)驗和成熟的系統(tǒng)解決方案。 Since we specialize in industry-specific solutions, we are able to provide customers tailor-made sealing and bearing solutions, specifically developed to meet their application requirements. In particular, we have long term experience in sealing and bearing applications within the following sectors:

應(yīng)對密封行業(yè)解決方案的挑戰(zhàn)
我們與半導(dǎo)體行業(yè)客戶緊密合作，尋求能*好地發(fā)揮客戶設(shè)備性能的密封材料和密封設(shè)計。 

滿足半導(dǎo)體行業(yè)日益嚴(yán)苛的需求的密封件 

我們在開發(fā)高性能密封解決方案領(lǐng)域的經(jīng)驗使我們有能力推薦*佳的設(shè)計方案。我們 廣泛的創(chuàng)新密封材料和產(chǎn)品 為要求*嚴(yán)苛的半導(dǎo)體制造環(huán)境提供超乎尋常的一體化密封解決方案 

了解我們是如何應(yīng)對半導(dǎo)體制造設(shè)備行業(yè)的密封挑戰(zhàn)的。

功能
產(chǎn)品系列
材料
應(yīng)用
 

半導(dǎo)體解決方案一站式服務(wù)


半導(dǎo)體密封產(chǎn)品系列包括：

工作溫度從 超低溫到超高溫 （ 850°C / 1562°F）
通用的 耐化學(xué)性
在真空或壓力或高溫環(huán)境下工作時具有 出色的穩(wěn)定性
極低水平的 離子雜質(zhì) （陰離子和陽離子）和 TOC (總有機(jī)碳量 )
即使在高溫下， 產(chǎn)生的顆粒和排氣量 *小
低滲透 率
減少 紅外線吸收 和減輕重量
良好的機(jī)械性能
長期壓縮變形率低
耐干加工和濕加工過程
探索特瑞堡適用于不同半導(dǎo)體環(huán)境的密封解決方案：
嚴(yán)苛的化學(xué)環(huán)境


在半導(dǎo)體制造中，密封件經(jīng)受熟知的一些*苛刻的化學(xué)介質(zhì)，包括：*具破壞性的酸，堿，溶劑和氣體。

*大化密封兼容性

特瑞堡密封系統(tǒng)致力于*大限度地提高標(biāo)準(zhǔn)密封配方與介質(zhì)的兼容性，以及開發(fā)特殊化合物，如全氟彈性體材料IsolastFabRange。

IsolastFabRange密封材料幾乎普遍兼容所有介質(zhì)和氣體，*進(jìn)的TurconPTFE基化合物也是如此。

易于選擇*佳的半導(dǎo)體密封材料

為了確定適合您應(yīng)用的*佳半導(dǎo)體密封材料，請使用在線工具， 化學(xué)兼容性 。

高溫



高溫半導(dǎo)體晶圓加工和等離子應(yīng)用包括快速熱處理（RTP），化學(xué)氣相沉積（CVD）和干法刻蝕。

*大化密封性能

密封件必須能承受高于300°C / 572°F的溫度，主要要求是低釋氣和*小顆粒產(chǎn)生。 特瑞堡密封系統(tǒng)的密封材料經(jīng)證明可在連續(xù)升高的溫度下成功運行，同時可承受高要求的化學(xué)品和介質(zhì)。

推薦的半導(dǎo)體密封材料和產(chǎn)品：

Isolast Fab Range J9650
Isolast Fab Range J9670
Turcon Varilip PDR
Wills Rings
等離子系統(tǒng)


在半導(dǎo)體晶片制造期間的各個階段均會使用到等離子體。

當(dāng)氣體經(jīng)受能量，破壞其分子完整性并將其離解成離子和電子時，會產(chǎn)生等離子體狀態(tài)。 在半導(dǎo)體工藝中用于此操作的許多氣體是有毒的，反應(yīng)性的和自燃的。 

超純密封解決方案


密封件必須能夠承受這種惡劣的等離子體環(huán)境，在這種環(huán)境中，它們會受到高能量和高溫的影響。 密封不足會導(dǎo)致污染并影響產(chǎn)品產(chǎn)量。 特瑞堡密封系統(tǒng)的超純密封解決方案可確保長期可靠性，同時極小的顆粒化和極低釋氣。

推薦半導(dǎo)體密封材料：

Isolast Fab Range J9675
真空技術(shù)


真空技術(shù) 在半導(dǎo)體制造中起著關(guān)鍵作用，是工藝產(chǎn)量和生產(chǎn)率的關(guān)鍵。半導(dǎo)體應(yīng)用范圍從干泵到更復(fù)雜的子系統(tǒng)，用于光刻等工藝。保持一致的真空是至關(guān)重要的，因為即使是微小的波動也會對整個生產(chǎn)周期產(chǎn)生負(fù)面影響。

通過嚴(yán)格的測試的密封解決方案 
有效密封是實現(xiàn)一致真空的重要因素。為了確定這種環(huán)境的*佳密封性，特瑞堡密封系統(tǒng)在進(jìn)行了廣泛的長期測試，以證明一系列密封解決方案現(xiàn)在真空條件下有效運行。

TurconVariseal具有出色的效果 
TurconVariseal在半導(dǎo)體應(yīng)用中進(jìn)行了測試。對密封件進(jìn)行氦氣噴涂，并用密封氦氣至10-6毫巴/秒，密封空氣至10-9毫巴/秒。這些是聚合物密封件的杰出水平。 

半導(dǎo)體真空應(yīng)用密封件：
Turcon Varilip PDR - 定制設(shè)計的密封件，耐惰性氣體
Turcon Variseal - 在腐蝕性環(huán)境中在高真空下操作
Wills Rings - 適用于硬真空下的低溫和高溫（*高1,000 Mpa / 145,038 psi / 10,000 bar）
濕法工藝


半導(dǎo)體濕法工藝步驟包括蝕刻，剝離，電鍍和CMP（化學(xué)機(jī)械拋光技術(shù)，然后進(jìn)行晶圓清洗，除去所有表面污染物：顆粒，有機(jī)物，金屬和天然氧化物的。 此外，所有使用的液體必須具有的純度。

這些化學(xué)密集型半導(dǎo)體工藝涉及濕法化學(xué)品，包括酸（如氫氟酸），堿性溶液（如氫氧化鈉和溶劑，通常是N-甲基吡咯烷酮或丙酮）。

密封件具有通用耐化學(xué)性

*佳密封性對于確保整個ULSI（超大規(guī)模集成）過程的*大化正常運行時間至關(guān)重要。 特瑞堡密封系統(tǒng)提供的半導(dǎo)體密封材料具有通用的耐化學(xué)性，能*大程度地析出離子雜質(zhì)，并且在濕法工藝應(yīng)用中具有極低的顆粒化。 

推薦半導(dǎo)體密封材料：

Isolast Fab Range J9610
產(chǎn)品

創(chuàng)新工程密封選擇

基于多年密封方案設(shè)計經(jīng)驗，特瑞堡密封系統(tǒng)可以從廣泛的創(chuàng)新密封產(chǎn)品中推薦*佳密封方案，其中許多產(chǎn)品專為滿足半導(dǎo)體行業(yè)日益嚴(yán)苛的工況而設(shè)計。
充氣密封 金屬組合密封 Fleximold O形圈 Turcon Varilip PDR Turcon Variseal Turcon Variseal NW Turcon Variseal PS Turcon Variseal Ultra Clean V-Ring Wills Rings

充氣密封


Airseals是由管狀彈性體制成的可充氣密封件，通過內(nèi)部加壓激活。 它們非常適用，例如潔凈室中的真空鎖和通道門，從而取代了傳統(tǒng)的平墊圈和O形圈，在這些*應(yīng)用中提高了性能。

金屬組合密封


特瑞堡密封系統(tǒng)可以有效地將 FKM 和 Isolast 和不同材料，如不銹鋼和低碳鋼，鋁，黃銅和各種塑料等制作成組合密封件。

經(jīng)濟(jì)有效地*大化密封完整性 
組合金屬密封件的優(yōu)點是：

*大化密封完整性
減少凹槽空隙的污染
易于組裝
減少庫存
高性價比
Fleximold


憑借專有的FlexiMold技術(shù)，特瑞堡密封系統(tǒng)可以 生產(chǎn)高精度，大直徑的O形圈和其他密封型材 。 FlexiMold巨型密封件的 質(zhì)量遠(yuǎn)優(yōu)于 那些通過拼接密封件或由擠壓線圈制成的密封件。

*大限度地縮短了交貨時間和降低工具成本 
密封件展示了 模塑產(chǎn)品的視覺和尺寸完整性 。 無需專用工具即可生產(chǎn)，靈活的生產(chǎn)方式*大程度地縮短了交貨時間和成本。 
各種彈性體制成的大型密封件


推薦用于超過500 mm / 20英寸的O形圈和其他密封型材。

符合 ISO 3601-1，AS568 和 JIS B 2401 標(biāo)準(zhǔn)，可生產(chǎn)幾乎 無限大的直徑 。
如果O形圈具有標(biāo)準(zhǔn)橫截面，則 無需模具費 。
可以提供 更大和特殊的橫截面 以及其他密封型材。
提供 多種彈性體 ，包括IsolastFFKM，ResifluorFluoroelastomers，F(xiàn)KM，EPDM和HNBR。
密封件生產(chǎn) “零”缺陷質(zhì)量要求 ，零件包裝和單獨標(biāo)記。
提供Class 100潔凈室 清洗和包裝，以及快遞服務(wù)。
大型O形圈和密封件主要用于半導(dǎo)體工業(yè)中的 平板顯示器 生產(chǎn)。

O形圈


特瑞堡密封系統(tǒng)提供各種O形圈，可在成本效益和性能之間取得平衡。 可提供任何尺寸的O形圈（標(biāo)準(zhǔn)或定制），包括使用Fleximold工藝的巨型O形圈。

廣泛的密封材料選擇

從基本彈性體到專為行業(yè)開發(fā)的化合物。 
推薦材料

nge
Resifluor 500
點擊查找更多有關(guān)于 O形圈 和Fleximold的信息

Turcon Varilip PDR


TurconVarilipPDR （高性能，耐久，可靠） 旋轉(zhuǎn)軸密封 件由一個或 多個TurconPTFE基材密封元件 構(gòu)成，固定在 精密加工的金屬體中 。 

Turcon密封元件在軸上提供正向動態(tài)密封，而金屬主體可為殼體提供堅固的靜態(tài)密封， 在高轉(zhuǎn)速下有效運行 。


較低的摩擦力可降低功耗 
該密封件具有低摩擦和無爬行的特點，可 降低溫度 ， 允許更高的圓周速度并降低功耗 。測試表明， 在Fomblin油 （通常用于半導(dǎo)體真空泵）中運行時，TurconVarilipPDR的扭矩（ 僅相當(dāng)于徑向油封扭矩的50％左右 ）。這樣可以延長服務(wù)壽命，維修將時間*大限度地延長，從而提高生產(chǎn)率。


TurconVarilipPDR密封件的優(yōu)點包括： 
TurconPTFE基材密封唇口

低摩擦， 有助于減少功率磨損和摩擦生熱 
的 自潤滑流體特性 進(jìn)一步減少了摩擦 
*進(jìn)的幾何形狀設(shè)計可在幾乎所有高速旋轉(zhuǎn)情況下提供出色的性能 
多唇口配置， 滿足大多數(shù)密封需求 
幾乎與所有介質(zhì)兼容 
符合FDA標(biāo)準(zhǔn)

金屬體

耐用 于惡劣環(huán)境 
有效的 靜態(tài)外周密封 
耐熱循環(huán) 
可選擇高品質(zhì)金屬， 包括不銹鋼，鋁和其他特殊金屬，如Hastelloy或Titanium 
高耐腐蝕性 
的精密加工表面， 可改善靜態(tài)界面的密封性 
Overall Turcon Varilip PDR seal

有助于降低設(shè)備的功耗 
高速運轉(zhuǎn)能力 高達(dá)每秒100米/每分鐘19,680英尺 
工作溫度范圍 -60°至200°C / -76°至392°F 
可用于 干運行和軟軸 
徑向油封溝槽 的改造 
無限保質(zhì)期 ，無特殊存儲要求

Turcon Variseal
現(xiàn)場證明，在的氣體和液體處理情況下，Variseal彈簧通電Turcon-PTFE基密封件已用于*苛刻的半導(dǎo)體密封應(yīng)用，包括高真空和腐蝕性環(huán)境Field-proven in extreme gas and liquid handling situations, Variseal spring-energized Turcon PTFE based seals have been used in the most demanding of semiconductor sealing applications , including high vacuum and corrosive environments.

系統(tǒng)完整性高High level of system integrity

通過正確選擇聚四氟乙烯，填充聚四氟乙烯化合物和適當(dāng)?shù)膹椈刹牧虾托筒模琓urcon Variseal可以提供*高水平的系統(tǒng)完整性。With the correct selection of PTFE, filled PTFE compounds and appropriate spring material and profile, Turcon Variseal can provide the highest level of system integrity .

對于靜態(tài)和動態(tài)應(yīng)用，Turcon Variseal具有低摩擦特性，從而延長了使用壽命。For static and dynamic applications, Turcon Variseal demonstrates low-friction characteristics, leading to extended service life .

Turcon Variseal NW


The Turcon case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media . Ideal for semiconductor applications, it can operate in a vacuum and is proven in fluorine gas.

Features of the Turcon Variseal NW seal:

Operates in extreme temperatures from -253°C/-423°F to 260°C/500°F 操作溫度從－253°C／423°F到260°C／500°F
Vacuum capability in air to 10-9mbar/ l/s
Excellent wear and friction characteristics優(yōu)良磨損與摩擦特性
Compatible with virtually all media and gases including fluorine gas at high temperature
Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals
Turcon Variseal PS


這種高性能密封件采用Turcon-PTFE基密封體設(shè)計，包括一個聚合物彈簧彈簧設(shè)計用于在低壓下精確地為密封件通電，同時使用系統(tǒng)介質(zhì)壓力保持高壓密封的完整性。Turcon Variseal PS具有符合半標(biāo)準(zhǔn)F57-0301的超低濾出雜質(zhì)和*小的排氣量，非常適合用于半導(dǎo)體濕法加工。This high-performance seal has been designed with a Turcon PTFE based sealing body, encompassing a polymeric spring. The spring is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity using the system media pressure. The Turcon Variseal PS has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing , making it ideal for use in semiconductor wet processing.

Features of the Turcon Variseal PS seal: Turcon Variseal PS密封的特點：

Ultra-low leach out and no outgassing 超低浸出率，不脫氣
Thermal stability from -253°C/-423°F to 80°C/176°F 從-253°C/-423°F到80°C/176°F的熱穩(wěn)定性
Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
Excellent wear and friction characteristics 優(yōu)良的磨損和摩擦特性
Compatible with virtually all chemicals 幾乎與所有化學(xué)品兼容
Available in standard and custom seal designs 提供標(biāo)準(zhǔn)和定制密封設(shè)計
Turcon Variseal Ultra Clean


這一渦輪極其干凈的密封在清潔的，使它理想地在處理設(shè)備中使用，在那里保持一個極其干凈的系統(tǒng)是一個優(yōu)先事項。在的超清潔渦輪設(shè)計中，激活海豹的春季要求封閉在渦輪內(nèi)。在半導(dǎo)體制造中，當(dāng)定時污染可以抑制波紋效應(yīng)時，可提取的金屬被排除在外。This Turcon Variseal Ultra-Clean seal offers the ultimate in cleanliness , making it ideal for use in processing equipment where maintaining an ultra-clean system is a priority. In the unique design of Turcon Variseal Ultra-Clean, the spring required to activate the seal is fully enclosed within a Turcon case. This means, in semiconductor fabrication, where the minutest contamination can destroy the effectiveness of wafers, metal extractables are totally excluded.

Features of the Turcon Variseal Ultra-Clean seal: 渦輪變壓器超清潔密封的特征

Operates in extreme temperatures from -253°C / -423°F to 260°C / 500°F 操作溫度從－253°C/－423°F至260°C/500°F
Withstands high pressures in excess of 100 bar / 1450 psi
Excellent wear and friction characteristics 優(yōu)良磨損與摩擦特性
Compatible with virtually all media
Suitable for piston, rod, face rotary, reciprocating and static situations
Easy retrofit into standard AS-568 O-Ring and Variseal grooves
V-Ring


V形密封圈是一種的旋轉(zhuǎn)軸全橡膠密封件，在保留潤滑劑的同時，提供了防止介質(zhì)（包括污垢、灰塵和水）進(jìn)入的解決方案。典型的應(yīng)用是化學(xué)機(jī)械拋光或晶圓切割設(shè)備，其工作速度可達(dá)12 m/s/39 ft/s。A unique all rubber seal for rotary shafts , V-Ring offers the perfect solution to prevent ingress of media including dirt, dust and water while retaining lubricant . Typical applications are on chemical mechanical polish or wafer dicing equipment, where it operates at a velocity up to 12 m/s / 39 ft/s.

Recommended sealing materials:

FKM
Isolast Fab Range
Wills Rings


Wills Rings是*初的金屬密封件，設(shè)計用于超過聚合物密封能力的條件下使用。Wills Rings are the original metal seals engineered for use in extreme conditions where the capabilities of polymeric seals are exceeded.

在*苛刻的條件下證明

在低溫至850°C/1562°F的溫度下工作，它們可承受高達(dá)1000兆帕/145038磅/平方英寸、10000巴的硬真空壓力。它們是連接器、法蘭和板靜態(tài)密封的理想選擇Proven in the most demanding of conditions 
Operating in temperatures from cryogenic up to 850°C / 1562°F , they withstａnd pressures from hard vacuum up to 1000 MPa / 145038 psi, 10000 bar. They are ideal for static sealing of connectors, flanges and plates.

可用于各種型材和金屬

Wills Rings可用于多種金屬中，包括o形截面或c形截面，可充壓或系統(tǒng)壓力激活。Available in various sections and metals 
Wills Rings are available in a wide range of metals, both in O-cross section or C-cross section with either pressure filled or system pressure activation .

Click here to find our Wills Rings product pages:

Wills Rings C
Wills Rings O
材料
Effective FKM Sealing


氟橡膠（FKM）密封件非常適合下游應(yīng)用，如真空泵和溫度不超過220°C/428°F的濕工藝應(yīng)用。Fluoroelastomer (FKM) seals are ideal for downstream applications such as vacuum pumps and wet process applications where temperatures do not exceed 220°C/428°F.

我們的一系列fkm密封材料對半導(dǎo)體工業(yè)中使用的各種化學(xué)品表現(xiàn)出優(yōu)異的耐腐蝕性，同時為半導(dǎo)體真空應(yīng)用提供低滲透和放氣水平的高純度。Our range of FKM sealing materials exhibits excellent resistance to a wide range of chemicals used in the semiconductor industry, while offering high purity with low permeation and outgassing levels for semiconductor vacuum applications.

Products:

O-Rings O形圈
Custom designed seals 定制設(shè)計的密封件
Fleximold 柔性模具
Isolast Fab Range


Isolast Fab Range offers the ultimate in elastomer sealing.

這些高性能全氟彈性體（ffkm）實際上是惰性的，并且在高達(dá)325oC/617的連續(xù)溫度下工作時顯示出幾乎普遍的化學(xué)相容性。These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.

Industry specific sealing

Isolast J9610 for wet process applications - the highest level of chemical resistance. 用于濕工藝應(yīng)用的Isolast J9610-*高水平的耐化學(xué)性

Isolast J9610 for wet process applications - the highest level of chemical resistance. 用于濕工藝應(yīng)用的Isolast J9610-*高水平的耐化學(xué)性
Isolast J9650 for high-temperature wafer processing applications - ultra-high purity.
Isolast J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.
isolast fab系列密封材料可用于標(biāo)準(zhǔn)和非標(biāo)準(zhǔn)o形環(huán)、工程模壓密封設(shè)計或與金屬密封部件粘合。密封件在潔凈室環(huán)境中制造和包裝。The Isolast Fab Range sealing materials are available in standard and non-standard O-Rings, engineered molded seal designs or as bonded to metal sealing components . Seals are manufactured and packaged in a cleanroom environment.

Resifluor 500 increases flexibility


Resifluor 500系列由具有改性聚合物結(jié)構(gòu)的優(yōu)質(zhì)fkm密封材料組成。樹脂氟500化合物的設(shè)計結(jié)合了三元乙丙橡膠對極性流體、堿和酸的耐化學(xué)性，以及fkm密封材料在各種要求流體中的性能特點。The Resifluor 500 range consists of premium FKM sealing materials with modified polymer architecture. Resifluor 500 compounds are engineered to combine the chemical resistance of an EPDM towards polar fluids, alkalis and acids, with the performance characteristics of FKM sealing materials in a variety of demanding fluids.

Seals with outstanding resistance阻力大的密封件

Resifulor 500密封范圍具有優(yōu)異的抗大量化學(xué)品和液體攻擊能力。它具有低總有機(jī)碳和類似于聚四氟乙烯的金屬可萃取性，提供了的清潔度。The Resifluor 500 sealing range has outstanding resistance to attack by a large number of chemicals and fluids . It has low total organic carbon and metal extractables similar to PTFE, providing exceptional cleanliness .

Products

O-Rings O形圈
Custom designed seals
Fleximold 柔性模具
Unique Turcon compounds


Turcon是Trelleborg密封解決方案系列專有聚四氟乙烯基密封材料的名稱。Turcon is the name for the Trelleborg Sealing Solutions range of proprietary PTFE based sealing material.

從本質(zhì)上講，聚四氟乙烯（PTFE）與幾乎所有的化學(xué)品都兼容，使其成為密封件可能暴露在苛刻介質(zhì)中的設(shè)備的理想選擇。通過添加填料和特殊加工技術(shù)，可獲得特定的操作性能。Inherently, Polytetrafluoroethylene (PTFE) is compatible with almost all chemicals, making it ideal for use in equipment where seals are likely to be exposed to demanding media. Specific operating properties are achieved by the addition of fillers and special processing technologies.

動態(tài)和旋轉(zhuǎn)密封元件Dynamic and rotating sealing elements

Turcon sealing materials:

Give excellent friction and self-lubricating characteristics 具有優(yōu)異的摩擦和自潤滑特性
Are suited to dynamic and rotating applications 適用于動態(tài)和旋轉(zhuǎn)應(yīng)用
The world's largest manufacturer of PTFE based seals

Trelleborg密封解決方案公司是世界上*大的此類密封材料制造商，沒有其他密封供應(yīng)商能提供如此廣泛的等級所有這些都是我們在歐洲、美國、南美和亞洲的工廠生產(chǎn)的。Trelleborg Sealing Solutions is the world's largest manufacturer of seals in this type of material, and no other sealing supplier can offer such a wide range of grades . All of these are produced at our own facilities in Europe, US, South America and Asia.

Turcon密封材料是在各種不同的密封幾何形狀下制造的以下是半導(dǎo)體行業(yè)*常用的密封類型：Turcon sealing materials are manufactured in a wide range of different seal geometries. Those listed below are the seal types most commonly used in the semiconductor industry:

Products

Turcon Varilip PDR
Turcon Variseal NW
Turcon Variseal PS
Turcon Variseal Ultra-Clean
Advanced engineered thermoplastics


高性能工程熱塑性塑料為聚醚醚酮（PEEK）和聚酰亞胺等材料提供了新的密封解決方案它們能承受高工作溫度，表現(xiàn)出良好的耐化學(xué)和等離子體性能，靜電控制和低放氣。High-performance engineered thermoplastics offer novel sealing solutions in materials such as PEEK (Polyether Ether Ketone) and polyimide . These withstａnd high service temperatures, demonstrate good chemical and plasma resistance, electrostatic control and low outgassing.

From bearing to bellows 從軸承到波紋管

HiMod wear rings and bearings從軸承到波紋管和軸承

已在許多半導(dǎo)體應(yīng)用中證明是成功的，這些應(yīng)用要求的尺寸穩(wěn)定性和低顆粒脫落。have proved successful in a number of semiconductor applications which require outstanding dimensional stability and low particle shedding.

*的Turcon PTFE組件包括波紋管。它們?yōu)橄鹉z接頭提供了高純度和化學(xué)相容的選擇。Specialized Turcon PTFE based components include bellows. They offer a high-purity and chemically compatible option for rubber joints.

*佳解決方案The optimum solution


Trelleborg Sealing Solutions works with semiconductor customers in development partnerships .我們可以共同確定一個適用于材料和海豹剖面的寬選擇的*佳封裝選擇。 Together we can identify the best sealing option for specific applications from a broad choice of materials and seal profiles.

探索我們的解決方案Explore our solutions

*新的半導(dǎo)體工藝要求越來越多。為了滿足這些需要，開發(fā)了創(chuàng)新的封裝解決方案，如下面列舉的那些解決方案。The latest semiconductor processes have increasingly challenging requirements . To fulfill these needs, innovative sealing solutions such as those listed below, are developed.

Longer life in CVD Equipment CVD設(shè)備使用壽命更長
Maintaining a vacuum in plasma 在等離子體中保持真空
Rotary seal for electric CVD motor 電動無級變速電機(jī)旋轉(zhuǎn)密封
Passing strict leakage tests 通過嚴(yán)格的泄漏測試
Isolast helps reduce maintenance Isolast有助于減少維護(hù)
Isolast lowers cost of ownership isolast降低了擁有成本
Eliminating leakage 消除泄漏
Longer life in CVD Equipment CVD設(shè)備使用壽命更長


密封問題Sealing issue:

cvd設(shè)備的用戶對密封產(chǎn)品的質(zhì)量要求很高。高真空需要超干凈的密封以防止污染。此外，通常有非常苛刻的化學(xué)和/或熱環(huán)境。The users of CVD equipment require high-quality sealing products. High vacuums need ultra-clean seals to prevent contamination. In addition, there are often very demanding chemical and/or thermal environments.

我們的客戶一直在尋求改進(jìn)其產(chǎn)品，所以他們在現(xiàn)有的應(yīng)用中嘗試了隔離環(huán)J9670材料中的O形密封圈。Our customer is always looking to improve its products, so they tried out O-Ring seals in Isolast J9670 material within existing applications.

解決方案Solution:

由ISOLAST J9670制造的O型環(huán)。該全氟彈性體化合物是isolast fab range之一，專為半導(dǎo)體應(yīng)用而設(shè)計。它的設(shè)計工作溫度高達(dá)315°C/599°F，對幾乎所有化學(xué)物質(zhì)都具有優(yōu)異的抵抗能力。O-Rings manufactured from Isolast J9670 . This proprietary perfluoroelastomer compound is one of the Isolast Fab Range especially engineered for semiconductor applications . It is designed to operate at temperatures up to 315°C / 599°F and offers superior resistance to almost every chemical.

結(jié)果Result:

在各種等離子體氣體中測試了六個月后，密封件沒有裂紋特別是，這種密封比以前的密封更能抵抗SF6等離子體氣體。這意味著Isolast J9670的使用壽命更長。After six months of testing Isolast J9670 within various plasma gases, there were no cracks in the seals . In particular, the seals proved more resistant to SF6 plasma gas than previous seals. This meant that Isolast J9670 gave a longer operating life .

在過去的兩年半中，客戶在其設(shè)備中集成了Isolast J9670密封件。For the last two-and-a-half years, the customer has integrated Isolast J9670 seals in its equipment.

在等離子體中保持真空Maintaining a vacuum in plasma


密封問題Sealing issue:

任務(wù)是密封進(jìn)入加工室的旋轉(zhuǎn)進(jìn)料需要保持500托的真空，同時密封以容納反應(yīng)性等離子體氣體。試驗室連續(xù)使用一小時，每小時關(guān)閉五分鐘。The task was to seal a rotary feed-through that went into a process chamber. A vacuum of 500 Torr needed to be maintained along with a tight seal to contain reactive plasma gases . The chamber was in continuous use for one hour with a five minute shut-down each hour.

解決方案Solution:

帶有Turcon T78護(hù)套和中等負(fù)荷哈氏合金彈簧的Turcon Variseal CM及其產(chǎn)品Turcon Variseal CM with a Turcon T78 jacket and medium-load Hastelloy spring along with an Products

結(jié)果Result:

Turcon Variseal厘米能夠在間歇工作期間保持所需的真空，同時暴露在等離子體氣體中。The Turcon Variseal CM was able to hold the required vacuum during intermittant service while exposed to the plasma gases.

使用條件Service Conditions:

Vacuum
121°C / 250°F
5 to 7 rpm
Gases
電動無級變速電機(jī)旋轉(zhuǎn)密封Rotary seal for electric CVD motor


密封問題Sealing issue:

任務(wù)是用一種化學(xué)惰性、無污染、長壽命的密封件取代目前的橡膠唇形密封。這必須改裝成現(xiàn)有的硬件。The task was to replace the current rubber lip seal with a chemically inert, non-contaminating, long-life seal. This had to be retrofitted into existing hardware.

解決方案Solution:

Turcon T78中的Turcon Varilip PDR，以低放氣FKM O型環(huán)作為激發(fā)劑。Turcon Varilip PDR in Turcon T78 with low outgassing FKM O-Ring as an energizer.

結(jié)果Result:

Turcon T78材料在應(yīng)用中對所需氣體提供了有效的阻力，并延長了電機(jī)的使用壽命。The Turcon T78 material provided effective resistance to the demanding gases within the application and also extended the service life of the motor.

使用條件Service Conditions:

0 psi
Ambient
5.41 m/s / 17.7 ft/ s
Nitrogen
通過嚴(yán)格的泄漏測試Passing strict leakage tests


密封問題Sealing issue:

像氦這樣的輕氣體尤其難以密封，因為它們能夠滲透到表面光潔度的山谷中。Light gases like helium can be especially difficult to seal because of their ability to permeate through even the valleys of a surface finish.

再加上高真空，這種應(yīng)用非常困難，要求密封件通過嚴(yán)格的泄漏試驗。此外，密封槽必須保留密封件，以便在密封件不脫落的情況下將其從石英上提起。Combined with high vacuum, this application was very difficult and required the seal to pass strict leakage tests. Also, the seal groove had to retain the seal so that it could be lifted from the quartz without the seal falling out.

解決方案Solution:

定制turcon variseal mf，帶有turcon t01護(hù)套和兩個嵌套的重載v形彈簧。Custom Turcon Variseal MF with a Turcon T01 jacket and two nested heavy-load V-springs.

結(jié)果Result:

如上圖所示夾緊密封件不僅將其保留在槽內(nèi)，而且消除了一條泄漏路徑。嵌套的V形彈簧在密封套上提供了所需的載荷，以滿足嚴(yán)格的泄漏要求Clamping the seal as shown in the diagram above not only retained it within the groove but eliminated one leakage path . The nested V-springs provided the required load on the seal jacket to pass the strict leakage requirements.

使用條件Service Conditions:

3.6 x 10-6 torr
-73°C to 100°C / -100°F to 212°F
Static
Helium
產(chǎn)品Products:

變壓密封MF V形彈簧通電端面密封Variseal MF V-spring-energized face seal

Isolast有助于減少維護(hù)Isolast helps reduce maintenance


密封問題Sealing issue:

作為工廠制造過程的一部分，在薄膜沉積的每一個處理步驟之后，一個干燥的“條狀”系統(tǒng)從wafers上去除光刻膠和殘留物。As a part of the fab manufacturing process, following each processing step of film deposition, a dry ‘strip' system removes photoresist and residues from wafers.

為此，wafers在高溫下暴露在氣態(tài)氧等離子體中。這導(dǎo)致系統(tǒng)內(nèi)的密封件迅速惡化，頻繁更換密封件中斷生產(chǎn)。To do this the wafer is exposed to gaseous oxygen plasma at high temperatures. This was causing seals within systems to quickly deteriorate , interrupting production with frequent seal changeover.

解決方案Solution :

O型環(huán)由ISOASTA FAB系列J9670制造，專門設(shè)計用于高溫等離子體環(huán)境，取代了現(xiàn)有的密封件。O-Rings manufactured from Isolast Fab Range J9670, specifically engineered for high temperature plasma environments, replaced the existing seals .

結(jié)果：延長了維護(hù)周期，在更換密封件期間，硅片產(chǎn)量從15000-20000片增加到50000片以上。這滿足了制造商的目標(biāo)，即增加計劃維修之間的平均時間，提高總產(chǎn)量和降低成本。Result: Maintenance cycles were extended, increasing production from 15,000-20,000 to over 50,000 wafers between seal changes. This met the fab manufacturer's aim of increasing mean time between planned maintenance, improving overall production yield and lowering costs.

isolast降低了成本Isolast lowers cost of ownership


密封問題Sealing issue:

一家主要的wafer探針卡制造商在生產(chǎn)過程中使用了等離子蝕刻設(shè)備，密封件暴露在要求很高的等離子和清洗劑中。A major manufacturer of wafer probe cards used plasma etch equipment in their production process and seals were exposed to demanding plasmas and cleaning agents .

安裝在等離子蝕刻設(shè)備上的O型環(huán)作為定期預(yù)防性維護(hù)定期更換客戶希望通過延長計劃維護(hù)之間的交貨期來降低擁有成本。O-Rings fitted in plasma etch equipment were regularly replaced as a matter of scheduled preventative maintenance. The customer wanted to lower cost of ownership by extending leadtime between planned maintenance.

解決方案Solution:

O型環(huán)由ISOASTA FAB系列J9670制造，專門設(shè)計用于高溫等離子體環(huán)境，取代了現(xiàn)有的密封件。O-Rings manufactured from Isolast Fab Range J9670 , specifically engineered for high temperature plasma environments, replaced the existing seals.

結(jié)果Result:

由Isolast Fab Range J9670制造的O形密封圈證明延長了密封壽命這意味著可以延長計劃維護(hù)之間的提前期，并達(dá)到降低擁有成本的目標(biāo)。The O-Rings manufactured from Isolast Fab Range J9670 proved to give extended seal life. This meant leadtimes between planned maintenance could be lengthened and the objective of lowering cost of ownership was met.

消除泄漏Eliminating leakage


密封問題Sealing issue:

此應(yīng)用中的密封件需要通過兩次泄漏測試-氦泄漏不能超過10 cc/sec，當(dāng)密封水時，密封件必須是自由下落的還需要低摩擦。The seal in this application was required to pass two leakage tests— helium leakage could not exceed 10 cc/sec , and when sealing water, the seal had to be drop-free . Low friction was also required.

解決方案Solution:

法蘭連接Flanged

Turcon Variseal
FW with a

Turcon
T05夾套和中載斜螺旋彈簧。T05 jacket and medium-load Slantcoil spring .

結(jié)果Result:

在這種應(yīng)用中，法蘭式Turcon Variseal FW被用于有效地消除O.D.的泄漏，而介質(zhì)彈簧提供了正確的負(fù)載，以實現(xiàn)摩擦和密封性之間的平衡。In this application the flanged Turcon Variseal FW was used to effectively eliminate leakage across the O.D. , while the medium spring provided the correct load to achieve a balance between friction and sealability.

使用條件Service Conditions:

0 to 0,6 MPa / 0 to 90 psi
52°C to 200°C / 125°F to 392°F
0.4 rpm
0.05 m/s / 0.16 ft/s
Hydrogen, Water, HCl
產(chǎn)品Products:

Turcon Variseal w斜線圈帶電桿密封Turcon Variseal W Slantcoil-energized rod seal

Turcon Variseal FW斜線圈通電法蘭密封Turcon Variseal FW Slantcoil-energized flange seal